Electrochemical behavior of cobalt in post-via etch cleaning solutions
- S. Bilouk
- , C. Pernel
- , L. Broussous
- , V. Ivanova
- , R. P. Nogueira
- ST Microelectronics
- SIMAP-CNRS, Institut Polytechnique de Grenoble
- CEA/Saclay
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review
6
Scopus
citations