Abstract
We present a growth mechanism of low temperature thin Ge films directly grown on Si substrate for GaAs based solar cells. The Ge films are grown using RF-PECVD and their structural, electrical and optical properties are tested in order to use them as a template for III-V growth. A two-step temperature technique and different GeH 4 flow rates have been employed during the deposition process. Our optimized growth limits the defect nucleation or dislocation misfit to 50 nm at the Si/Ge interface. Morever, the measured threading dislocation density (TDD) of 700 nm thick Ge films is 1×106 cm -2 which paves the way to achieve high quality growth of GaAs for solar cells.
| Original language | British English |
|---|---|
| Title of host publication | 2018 IEEE 7th World Conference on Photovoltaic Energy Conversion, WCPEC 2018 - A Joint Conference of 45th IEEE PVSC, 28th PVSEC and 34th EU PVSEC |
| Publisher | Institute of Electrical and Electronics Engineers Inc. |
| Pages | 3857-3860 |
| Number of pages | 4 |
| ISBN (Electronic) | 9781538685297 |
| DOIs | |
| State | Published - 26 Nov 2018 |
| Event | 7th IEEE World Conference on Photovoltaic Energy Conversion, WCPEC 2018 - Waikoloa Village, United States Duration: 10 Jun 2018 → 15 Jun 2018 |
Publication series
| Name | 2018 IEEE 7th World Conference on Photovoltaic Energy Conversion, WCPEC 2018 - A Joint Conference of 45th IEEE PVSC, 28th PVSEC and 34th EU PVSEC |
|---|
Conference
| Conference | 7th IEEE World Conference on Photovoltaic Energy Conversion, WCPEC 2018 |
|---|---|
| Country/Territory | United States |
| City | Waikoloa Village |
| Period | 10/06/18 → 15/06/18 |
UN SDGs
This output contributes to the following UN Sustainable Development Goals (SDGs)
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SDG 7 Affordable and Clean Energy
Keywords
- GaAs solar cell
- Ge-on-Si
- low temperature
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