Design and optimization of slotted multimode interference devices for chemical and biochemical sensing

The major achievements in the field of optical sensors in the past two decades have remained mostly limited to the laboratory demonstrations. There are very few examples of optical sensors, which have been reduced to practice, and have established themselves in major markets. The main bottleneck in this field is the issue of manufacturability. In this paper we present optical sensors based on slotted multimode interference waveguides. We show that the sensitivity increases proportionally to the number of slots. The sensor can be tuned to highest sensitivity in the refractive index ranges necessary to detect protein-based molecules or other water-soluble chemical or biological materials. The material of choice is a sol-gel (ORMOCER) matrix that after completion of the process becomes mostly glass and it is highly stable. Sensors made with this technology are suited to high volume manufacturing.