Design and fabrication of slotted multimode interference devices for chemical and biological sensing

M. Mayeh; J. Viegas; P. Srinivasan; P. Marques; J. L. Santos; E. G. Johnson; F. Farahi

doi:10.1155/2009/470175

Design and fabrication of slotted multimode interference devices for chemical and biological sensing

M. Mayeh, J. Viegas, P. Srinivasan, P. Marques, J. L. Santos, E. G. Johnson, F. Farahi

Electrical Engineering

Research output: Contribution to journal › Article › peer-review

12 Scopus citations

Abstract

We present optical sensors based on slotted multimode interference waveguides. The sensor can be tuned to highest sensitivity in the refractive index ranges necessary to detect protein-based molecules or other water-soluble chemical or biological materials. The material of choice is low-loss silicon oxynitride (SiON) which is highly stable to the reactivity with biological agents and processing chemicals. Sensors made with this technology are suited to high volume manufacturing.

Original language	British English
Article number	470175
Journal	Journal of Sensors
Volume	2009
DOIs	https://doi.org/10.1155/2009/470175
State	Published - 2009

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AU - Johnson, E. G.

AU - Farahi, F.

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Design and fabrication of slotted multimode interference devices for chemical and biological sensing

Abstract

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