@inproceedings{be79206707254f8a972247fb6338b712,
title = "CVD graphene materials integration: Pressure and argon sensor",
abstract = "We demonstrate a pressure sensor and argon gas sensor based on CVD graphene film. The pressure sensing mechanism is based on strain-induced changes in the band structure. While the gas sensor mechanism is based on the mass sensing approach for the graphene. Electrical measurements data demonstrate the feasibility of both sensors. The sensors were formed by using CVD graphene film with a active area size of 2×1cm2, that was transferred on top of Si/SiO2 substrate with silver as top metal contact.",
author = "Lina Tizani and Irfan Saadat",
note = "Publisher Copyright: {\textcopyright} 2017 IEEE.; 12th IEEE Nanotechnology Materials and Devices Conference, NMDC 2017 ; Conference date: 02-10-2017 Through 04-10-2017",
year = "2017",
month = jul,
day = "2",
doi = "10.1109/NMDC.2017.8350516",
language = "British English",
series = "2017 IEEE 12th Nanotechnology Materials and Devices Conference, NMDC 2017",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "93--94",
booktitle = "2017 IEEE 12th Nanotechnology Materials and Devices Conference, NMDC 2017",
address = "United States",
}