@inproceedings{edb5cb1e9efd44d4bca52b4b65dec404,
title = "Critical Buckling Voltage Shift-Based Resonant Vacuum Pressure Micro-Sensor",
abstract = "In this work, a new pressure-sensing approach is presenting based on measuring the critical buckling voltage shift of an in-plane heated buckled microbeam with the presence of air pressure. The results show excellent linearity in the wide range of pressure from 2 to 100 Torr. Moreover, the proposed miniature pressure sensor shows a high sensitivity of 11.98 mV/Torr at its resonant frequency of 4 kHz and ambient temperature. The low power consumption, repeatability, and simplicity in design make the proposed sensor promising to realize high performance high-vacuum sensing applications.",
keywords = "critical buckling voltage, high sensitivity, straight micro-beam, Vacuum pressure sensor",
author = "Nouha Alcheikh",
note = "Publisher Copyright: {\textcopyright} 2024 IEEE.; 2024 IEEE Sensors, SENSORS 2024 ; Conference date: 20-10-2024 Through 23-10-2024",
year = "2024",
doi = "10.1109/SENSORS60989.2024.10784715",
language = "British English",
series = "Proceedings of IEEE Sensors",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2024 IEEE Sensors, SENSORS 2024 - Conference Proceedings",
address = "United States",
}