TY - GEN
T1 - Corrected squeezed-film damping simulation validated with a lorentz-force magnetometer operating in vacuum
AU - Sinding, Alexandre
AU - Ocak, Ilker E.
AU - Syed, Wajih U.
AU - Chatterjee, Aveek N.
AU - Welham, Christopher
AU - Liu, Shuangqin
AU - Yan, Jun
AU - Breit, Stephen
AU - Chang, Hyun Kee
AU - Elfadel, Ibrahim Abe M.
AU - Sbiaa, Zouhair
N1 - Publisher Copyright:
© 2017 IEEE.
PY - 2017/2/23
Y1 - 2017/2/23
N2 - A number of corrections to the well-known squeezed-film gas damping model are required to get accurate results for MEMS. This paper reports on the implementation and validation of a corrected squeezed-film damping (SFD) simulation for common MEMS structures, electrostatic comb fingers, under various vacuum levels. Experimental Q factors were measured for the first in-plane resonant mode of a Lorentz-force magnetometer. An acoustic boundary condition was implemented to accommodate, in different areas of the sensor, various ratios a/h of squeezing surface characteristic dimension a to squeezed gas gap h. At a typical operating pressure for this sensor, e.g. 10Pa, corresponding to Knudsen number Kn ∼ 670, the simulated Q factor is within +/-25% of the measured value. This new, corrected simulation approach provides, for the first time, a practical and accurate way of predicting Q factors for complex capacitive MEMS sensors such as accelerometers, gyroscopes and magnetometers that operate at low pressure.
AB - A number of corrections to the well-known squeezed-film gas damping model are required to get accurate results for MEMS. This paper reports on the implementation and validation of a corrected squeezed-film damping (SFD) simulation for common MEMS structures, electrostatic comb fingers, under various vacuum levels. Experimental Q factors were measured for the first in-plane resonant mode of a Lorentz-force magnetometer. An acoustic boundary condition was implemented to accommodate, in different areas of the sensor, various ratios a/h of squeezing surface characteristic dimension a to squeezed gas gap h. At a typical operating pressure for this sensor, e.g. 10Pa, corresponding to Knudsen number Kn ∼ 670, the simulated Q factor is within +/-25% of the measured value. This new, corrected simulation approach provides, for the first time, a practical and accurate way of predicting Q factors for complex capacitive MEMS sensors such as accelerometers, gyroscopes and magnetometers that operate at low pressure.
UR - http://www.scopus.com/inward/record.url?scp=85015744407&partnerID=8YFLogxK
U2 - 10.1109/MEMSYS.2017.7863551
DO - 10.1109/MEMSYS.2017.7863551
M3 - Conference contribution
AN - SCOPUS:85015744407
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 889
EP - 892
BT - 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017
Y2 - 22 January 2017 through 26 January 2017
ER -