Skip to main navigation Skip to search Skip to main content

Characterization of new a-Si:H detectors fabricated from amorphous silicon deposited at high rate by helium enhanced PECVD

    • CEA/Saclay

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    Fingerprint

    Dive into the research topics of 'Characterization of new a-Si:H detectors fabricated from amorphous silicon deposited at high rate by helium enhanced PECVD'. Together they form a unique fingerprint.
    Sort by

    Engineering

    Material Science