Characterization of a Resonant Lorentz Force MEMS Magnetometer

Muneera Al-Shaibah, Ru Li, Dima S. Ali, Zakriya Mohammed, Sultan Aldahmani, Daniel Choi, Ibrahim Abe M. Elfadel

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

Abstract

This paper presents the preliminary characterization of a Micro-Electro-Mechanical (MEMS) magnetometer that operates based on the Lorentz force principle. The device is fabricated using a MEMSCAP SOIMUMPs foundry process with a25 μ m thick Silicon layer. DC and modal analysis are conducted to identify the static capacitance and resonance frequency of the design, which are reported as 1.463 pF and 43.15 kHz, respectively. Furthermore, the device was tested under ambient conditions for static capacitance. The measurement result of 1.928 pF shows an adequate agreement with the simulated result.

Original languageBritish English
Title of host publication2020 Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2020
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781728189017
DOIs
StatePublished - Jun 2020
Event2020 Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2020 - Lyon, France
Duration: 15 Jun 202026 Jun 2020

Publication series

Name2020 Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2020

Conference

Conference2020 Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2020
Country/TerritoryFrance
CityLyon
Period15/06/2026/06/20

Keywords

  • Lorentz force
  • Magnetometer
  • MEMS

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