@inproceedings{3d2443a5e8da40ca98e6c3784abd35a3,
title = "Characterization of a Resonant Lorentz Force MEMS Magnetometer",
abstract = "This paper presents the preliminary characterization of a Micro-Electro-Mechanical (MEMS) magnetometer that operates based on the Lorentz force principle. The device is fabricated using a MEMSCAP SOIMUMPs foundry process with a25 μ m thick Silicon layer. DC and modal analysis are conducted to identify the static capacitance and resonance frequency of the design, which are reported as 1.463 pF and 43.15 kHz, respectively. Furthermore, the device was tested under ambient conditions for static capacitance. The measurement result of 1.928 pF shows an adequate agreement with the simulated result.",
keywords = "Lorentz force, Magnetometer, MEMS",
author = "Muneera Al-Shaibah and Ru Li and Ali, {Dima S.} and Zakriya Mohammed and Sultan Aldahmani and Daniel Choi and Elfadel, {Ibrahim Abe M.}",
note = "Funding Information: ACKNOWLEDGMENTS This work is funded by the United Arab Emirates Space Agency, Space Missions Science and Technology Directorate, Reference M06&15-2016-002. Publisher Copyright: {\textcopyright} 2020 IEEE.; 2020 Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2020 ; Conference date: 15-06-2020 Through 26-06-2020",
year = "2020",
month = jun,
doi = "10.1109/DTIP51112.2020.9139146",
language = "British English",
series = "2020 Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2020",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2020 Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2020",
address = "United States",
}