Beam shaping for ultra-compact waveguide crossings on monolithic silicon photonics platform

Sujith Chandran, Marcus Dahlem, Yusheng Bian, Paulo Moreira, Ajey P. Jacob, Michal Rakowski, Andy Stricker, Karen Nummy, Colleen Meagher, Bo Peng, Abu Thomas, Shuren Hu, Jan Petykiewicz, Zoey Sowinski, Won Suk Lee, Rod Augur, Dave Riggs, Ted Letavic, Anthony Yu, Ken GiewontJohn Pellerin, Jaime Viegas

Research output: Contribution to journalArticlepeer-review

19 Scopus citations

Abstract

A beam shaping approach has been implemented to realize high-performance waveguide crossings based on cosine tapers. Devices with a compact footprint of 4.7 µm × 4.7 µm were fabricated on the GLOBALFOUNDRIES 45 nm monolithic silicon photonics platform (45 CLO technology). Fabricated devices are found to be nearly wavelength independent (±0.035 dB for 1260 nm ≤ λ ≤ 1360 nm) with low insertion loss (∼ 0.2 dB) and crosstalk (−35 dB). The measured response of the devices is consistent with the three-dimensional finite-difference time-domain simulation results. The design stability is validated by measuring the device insertion loss on eight chips, which is found to be 0.197 ± 0.017 dB at the designed center wavelength of 1310 nm.

Original languageBritish English
Pages (from-to)6230-6233
Number of pages4
JournalOptics Letters
Volume45
Issue number22
DOIs
StatePublished - 15 Nov 2020

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