An efficient resistance sensitivity extraction algorithm for conductors of arbitrary shapes

Tarek El-Moselhy, I. M. Elfadel, Bill Dewey

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

3 Scopus citations

Abstract

Due to technology scaling, integrated circuit manufacturing techniques are producing structures with large variabilities in their dimensions. To guarantee high yield, the manufactured structures must have the proper electrical characteristics despite such geometrical variations. For a designer, this means extracting the electrical characteristics of a whole family of structure realizations in order to guarantee that they all satisfy the required electrical characteristics. Sensitivity extraction provides an efficient algorithm to extract all realizations concurrently. This paper presents a complete frame-work for efficient resistance sensitivity extraction. The framework is based on both the Finite Element Method (FEM) for resistance extraction and the adjoint method for sensitivity analysis. FEM enables the calculation of resistances of interconnects of arbitrary shapes, while the adjoint method enables sensitivity calculation in a computational complexity that is independent of the number of varying parameters. The accuracy and efficiency of the algorithm are demonstrated on a variety of complex examples.

Original languageBritish English
Title of host publication2009 46th ACM/IEEE Design Automation Conference, DAC 2009
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages770-775
Number of pages6
ISBN (Print)9781605584973
DOIs
StatePublished - 2009
Event2009 46th ACM/IEEE Design Automation Conference, DAC 2009 - San Francisco, CA, United States
Duration: 26 Jul 200931 Jul 2009

Publication series

NameProceedings - Design Automation Conference
ISSN (Print)0738-100X

Conference

Conference2009 46th ACM/IEEE Design Automation Conference, DAC 2009
Country/TerritoryUnited States
CitySan Francisco, CA
Period26/07/0931/07/09

Keywords

  • Adjoint method
  • Finite-element method
  • Resistance extraction
  • Sensitivity
  • Shape variations

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