A novel squeezed-film damping model for MEMS comb structures
- Alexandre Sinding
- , Arnaud Parent
- , Ilker E. Ocak
- , Wajih U. Syed
- , Aveek N. Chatterjee
- , Christopher Welham
- , Shuangqin Liu
- , Jun Yan
- , Stephen Breit
- , Hyun Kee Chang
- , Ibrahim Abe M. Elfadel
- , Zouhair Sbiaa
- Coventor Inc.
- A-Star, Institute of Microelectronics
- GLOBALFOUNDRIES
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review
2
Scopus
citations