A novel squeezed-film damping model for MEMS comb structures

Alexandre Sinding, Arnaud Parent, Ilker E. Ocak, Wajih U. Syed, Aveek N. Chatterjee, Christopher Welham, Shuangqin Liu, Jun Yan, Stephen Breit, Hyun Kee Chang, Ibrahim Abe M. Elfadel, Zouhair Sbiaa

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Scopus citations

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