@inproceedings{dc1240c7c08d4688b54e8a730cac5628,
title = "A novel squeezed-film damping model for MEMS comb structures",
abstract = "We present the implementation and validation of a novel model for simulating comb squeezed-film damping. The model is computationally efficient regardless of finger count and optionally includes top and bottom encapsulation surfaces surrounding the fingers. Comparison with standard numerical simulation shows a difference in damping coefficient of less than 1\%. One application is to predict the Q factors of resonant MEMS such as gyroscopes for which a high Q-factor ensures stable oscillations and certain magnetometers for which it amplifies the sensitivity. The model is validated against experimental Q factors of a magnetometer, predicted values are within 10\% of measurement from 0.01MPa to 100Pa.",
keywords = "Comb Finger, Damping, Magnetometer, MEMS, Model Validation, Q-Factor, Simulation, Squeezed-Film",
author = "Alexandre Sinding and Arnaud Parent and Ocak, \{Ilker E.\} and Syed, \{Wajih U.\} and Chatterjee, \{Aveek N.\} and Christopher Welham and Shuangqin Liu and Jun Yan and Stephen Breit and Chang, \{Hyun Kee\} and Elfadel, \{Ibrahim Abe M.\} and Zouhair Sbiaa",
note = "Publisher Copyright: {\textcopyright} 2017 IEEE.; 19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 ; Conference date: 18-06-2017 Through 22-06-2017",
year = "2017",
month = jul,
day = "26",
doi = "10.1109/TRANSDUCERS.2017.7994487",
language = "British English",
series = "TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "2095--2098",
booktitle = "TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems",
address = "United States",
}