A novel squeezed-film damping model for MEMS comb structures

Alexandre Sinding, Arnaud Parent, Ilker E. Ocak, Wajih U. Syed, Aveek N. Chatterjee, Christopher Welham, Shuangqin Liu, Jun Yan, Stephen Breit, Hyun Kee Chang, Ibrahim Abe M. Elfadel, Zouhair Sbiaa

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Scopus citations

Abstract

We present the implementation and validation of a novel model for simulating comb squeezed-film damping. The model is computationally efficient regardless of finger count and optionally includes top and bottom encapsulation surfaces surrounding the fingers. Comparison with standard numerical simulation shows a difference in damping coefficient of less than 1%. One application is to predict the Q factors of resonant MEMS such as gyroscopes for which a high Q-factor ensures stable oscillations and certain magnetometers for which it amplifies the sensitivity. The model is validated against experimental Q factors of a magnetometer, predicted values are within 10% of measurement from 0.01MPa to 100Pa.

Original languageBritish English
Title of host publicationTRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages2095-2098
Number of pages4
ISBN (Electronic)9781538627310
DOIs
StatePublished - 26 Jul 2017
Event19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 - Kaohsiung, Taiwan, Province of China
Duration: 18 Jun 201722 Jun 2017

Publication series

NameTRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems

Conference

Conference19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017
Country/TerritoryTaiwan, Province of China
CityKaohsiung
Period18/06/1722/06/17

Keywords

  • Comb Finger
  • Damping
  • Magnetometer
  • MEMS
  • Model Validation
  • Q-Factor
  • Simulation
  • Squeezed-Film

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