A novel approach to the analysis of squeezed-film air damping in microelectromechanical systems
- Weilin Yang
- , Hongxia Li
- , Aveek N. Chatterjee
- , Ibrahim M. Elfadel
- , Ilker Ender Ocak
- , Tiejun Zhang
- GLOBALFOUNDRIES
- A-Star, Institute of Microelectronics
Research output: Contribution to journal › Article › peer-review
18
Scopus
citations