A Low-Cost, Nanowatt, Millimeter-Scale Memristive-Vacuum Sensor

Khaled Humood; Sueda Saylan; Baker Mohammad; Maguy Abi Jaoude

doi:10.1109/JSEN.2022.3147035

A Low-Cost, Nanowatt, Millimeter-Scale Memristive-Vacuum Sensor

Khaled Humood, Sueda Saylan, Baker Mohammad, Maguy Abi Jaoude

University of Southampton

Research output: Contribution to journal › Article › peer-review

4 Scopus citations

Abstract

This work demonstrates a low-power, light-weight, and cost-efficient vacuum pressure sensor and air leak detector based on 2 mm ×2 mm Cu/HfO2/ p^+ -Si memristor device. The operating principle of the proposed sensor relies on monitoring the off-state resistance ( R_off ) of the device, wherein the experimental results show that the R_off value is inversely proportional to the vacuum pressure. The fabricated sensors demonstrated a sensitivity of 493 Torr-1 and power consumption as low as ∼ 8 nW, when tested in a wide range of sub-atmospheric pressure ( 4.9× 10^-5 - 760 ) Torr, making them highly suitable for low-power applications. Furthermore, it is shown that the sensor can be integrated with a microcontroller-based circuitry to serve as a standalone sensing system.

Original language	British English
Pages (from-to)	6080-6087
Number of pages	8
Journal	IEEE Sensors Journal
Volume	22
Issue number	6
DOIs	https://doi.org/10.1109/JSEN.2022.3147035
State	Published - 15 Mar 2022

Keywords

air leak detector
memristor
ReRAM
Vacuum sensor

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10.1109/JSEN.2022.3147035

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title = "A Low-Cost, Nanowatt, Millimeter-Scale Memristive-Vacuum Sensor",

abstract = "This work demonstrates a low-power, light-weight, and cost-efficient vacuum pressure sensor and air leak detector based on 2 mm ×2 mm Cu/HfO2/ p^+ -Si memristor device. The operating principle of the proposed sensor relies on monitoring the off-state resistance ( R_off ) of the device, wherein the experimental results show that the R_off value is inversely proportional to the vacuum pressure. The fabricated sensors demonstrated a sensitivity of 493 Torr-1 and power consumption as low as ∼ 8 nW, when tested in a wide range of sub-atmospheric pressure ( 4.9× 10^-5 - 760 ) Torr, making them highly suitable for low-power applications. Furthermore, it is shown that the sensor can be integrated with a microcontroller-based circuitry to serve as a standalone sensing system.",

keywords = "air leak detector, memristor, ReRAM, Vacuum sensor",

author = "Khaled Humood and Sueda Saylan and Baker Mohammad and Jaoude, {Maguy Abi}",

note = "Funding Information: This work was supported in part by the UAE Space Agency under Grant K08 2016 001 and in part by the Khalifa University System-on- Chip Center (SoCC) under Grant RC2 2018-020. Publisher Copyright: {\textcopyright} 2001-2012 IEEE.",

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AU - Mohammad, Baker

AU - Jaoude, Maguy Abi

N1 - Funding Information: This work was supported in part by the UAE Space Agency under Grant K08 2016 001 and in part by the Khalifa University System-on- Chip Center (SoCC) under Grant RC2 2018-020. Publisher Copyright: © 2001-2012 IEEE.

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N2 - This work demonstrates a low-power, light-weight, and cost-efficient vacuum pressure sensor and air leak detector based on 2 mm ×2 mm Cu/HfO2/ p^+ -Si memristor device. The operating principle of the proposed sensor relies on monitoring the off-state resistance ( R_off ) of the device, wherein the experimental results show that the R_off value is inversely proportional to the vacuum pressure. The fabricated sensors demonstrated a sensitivity of 493 Torr-1 and power consumption as low as ∼ 8 nW, when tested in a wide range of sub-atmospheric pressure ( 4.9× 10^-5 - 760 ) Torr, making them highly suitable for low-power applications. Furthermore, it is shown that the sensor can be integrated with a microcontroller-based circuitry to serve as a standalone sensing system.

AB - This work demonstrates a low-power, light-weight, and cost-efficient vacuum pressure sensor and air leak detector based on 2 mm ×2 mm Cu/HfO2/ p^+ -Si memristor device. The operating principle of the proposed sensor relies on monitoring the off-state resistance ( R_off ) of the device, wherein the experimental results show that the R_off value is inversely proportional to the vacuum pressure. The fabricated sensors demonstrated a sensitivity of 493 Torr-1 and power consumption as low as ∼ 8 nW, when tested in a wide range of sub-atmospheric pressure ( 4.9× 10^-5 - 760 ) Torr, making them highly suitable for low-power applications. Furthermore, it is shown that the sensor can be integrated with a microcontroller-based circuitry to serve as a standalone sensing system.

KW - air leak detector

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A Low-Cost, Nanowatt, Millimeter-Scale Memristive-Vacuum Sensor

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Keywords

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