A Low-Cost, Nanowatt, Millimeter-Scale Memristive-Vacuum Sensor

Khaled Humood, Sueda Saylan, Baker Mohammad, Maguy Abi Jaoude

Research output: Contribution to journalArticlepeer-review

1 Scopus citations


This work demonstrates a low-power, light-weight, and cost-efficient vacuum pressure sensor and air leak detector based on 2 mm ×2 mm Cu/HfO2/ p^+ -Si memristor device. The operating principle of the proposed sensor relies on monitoring the off-state resistance ( R_off ) of the device, wherein the experimental results show that the R_off value is inversely proportional to the vacuum pressure. The fabricated sensors demonstrated a sensitivity of 493 Torr-1 and power consumption as low as ∼ 8 nW, when tested in a wide range of sub-atmospheric pressure ( 4.9× 10^-5 - 760 ) Torr, making them highly suitable for low-power applications. Furthermore, it is shown that the sensor can be integrated with a microcontroller-based circuitry to serve as a standalone sensing system.

Original languageBritish English
Pages (from-to)6080-6087
Number of pages8
JournalIEEE Sensors Journal
Issue number6
StatePublished - 15 Mar 2022


  • air leak detector
  • memristor
  • ReRAM
  • Vacuum sensor


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