A frequency-domain thermoreflectance method for the characterization of thermal properties

Aaron J. Schmidt; Ramez Cheaito; Matteo Chiesa

doi:10.1063/1.3212673

A frequency-domain thermoreflectance method for the characterization of thermal properties

Aaron J. Schmidt, Ramez Cheaito, Matteo Chiesa

Mechanical & Nuclear Engineering

Massachusetts Institute of Technology

Research output: Contribution to journal › Article › peer-review

368 Scopus citations

Abstract

A frequency-domain thermoreflectance method for measuring the thermal properties of homogenous materials and submicron thin films is described. The method can simultaneously determine the thermal conductivity and heat capacity of a sample, provided the thermal diffusivity is 3× 10^-6 m ² /s, and can also simultaneously measure in-plane and cross-plane thermal conductivities, as well the thermal boundary conductance between material layers. Two implementations are discussed, one based on an ultrafast pulsed laser system and one based on continuous-wave lasers. The theory of the method and an analysis of its sensitivity to various thermal properties are given, along with results from measurements of several standard materials over a wide range of thermal diffusivities. We obtain specific heats and thermal conductivities in good agreement with literature values, and also obtain the in-plane and cross-plane thermal conductivities for crystalline quartz.

Original language	British English
Article number	094901
Journal	Review of Scientific Instruments
Volume	80
Issue number	9
DOIs	https://doi.org/10.1063/1.3212673
State	Published - 2009

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10.1063/1.3212673

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abstract = "A frequency-domain thermoreflectance method for measuring the thermal properties of homogenous materials and submicron thin films is described. The method can simultaneously determine the thermal conductivity and heat capacity of a sample, provided the thermal diffusivity is 3× 10-6 m 2 /s, and can also simultaneously measure in-plane and cross-plane thermal conductivities, as well the thermal boundary conductance between material layers. Two implementations are discussed, one based on an ultrafast pulsed laser system and one based on continuous-wave lasers. The theory of the method and an analysis of its sensitivity to various thermal properties are given, along with results from measurements of several standard materials over a wide range of thermal diffusivities. We obtain specific heats and thermal conductivities in good agreement with literature values, and also obtain the in-plane and cross-plane thermal conductivities for crystalline quartz.",

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AB - A frequency-domain thermoreflectance method for measuring the thermal properties of homogenous materials and submicron thin films is described. The method can simultaneously determine the thermal conductivity and heat capacity of a sample, provided the thermal diffusivity is 3× 10-6 m 2 /s, and can also simultaneously measure in-plane and cross-plane thermal conductivities, as well the thermal boundary conductance between material layers. Two implementations are discussed, one based on an ultrafast pulsed laser system and one based on continuous-wave lasers. The theory of the method and an analysis of its sensitivity to various thermal properties are given, along with results from measurements of several standard materials over a wide range of thermal diffusivities. We obtain specific heats and thermal conductivities in good agreement with literature values, and also obtain the in-plane and cross-plane thermal conductivities for crystalline quartz.

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A frequency-domain thermoreflectance method for the characterization of thermal properties

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