@inproceedings{8e0e027c5c0d41b6a8eef2e7409d4f32,
title = "A crab leg suspension based dual axis MEMS accelerometer with low cross axis sensitivity",
abstract = "This paper reports on the design and optimization of a 2-Axis, single proof mass MEMS capacitive accelerometer, using the Inertial Measurement Unit (IMU) platform of GlobalFoundries. The accelerometer consists of a square proof mass suspended using crab leg springs. As dual axis accelerometers are designed to work in both in-plane directions, they are prone to cross-coupling between in-plane acceleration and Z-Axis acceleration. This is due to the structural design that makes them sensitive to cross-Axis acceleration. Moreover, low stiffness in Z-Axis causes the proof-mass to sag due to gravity. In the present paper, we address the cross-Axis sensitivity issue in the context of a high-sensitivity, differential capacitive accelerometer in a small footprint of 1.5mm x 1.5 mm, with reduced in-plane cross-Axis sensitivity and high frequency separation among the in-plane and Z-Axis modes. Simulation results show a differential capacitive sensitivity of 59fF/g (g=9.8 m/s2) can be achieved. The device also has a mode separation of 10 kHz between in-plane and out-of-The plane modes. The average cross-Axis sensitivity in XY is 1.33% and the cross-Axis sensitivity due to Z-Axis acceleration is zero.",
author = "Zakriya Mohammed and Alabi Bojesomo and Gill, {Waqas A.} and Elfadel, {Ibrahim M.} and Mahmoud Rasras",
note = "Publisher Copyright: {\textcopyright} 2016 IEEE.; 59th IEEE International Midwest Symposium on Circuits and Systems, MWSCAS 2016 ; Conference date: 16-10-2016 Through 19-10-2016",
year = "2016",
month = jul,
day = "2",
doi = "10.1109/MWSCAS.2016.7870040",
language = "British English",
series = "Midwest Symposium on Circuits and Systems",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2016 IEEE 59th International Midwest Symposium on Circuits and Systems, MWSCAS 2016",
address = "United States",
}