SUSS MA8/BA8e Litho Contact Aligner

    Equipment/facility: Equipment

    • LocationShow on map

      Masdar Institute, 1A, Undercroft, Micro/Nanofabrication Facility, Bay 4

    Equipments Details

    Description

    The SUSS MA8/BA8e is a manual (with assisted image recognition) UV aligner that exposes samples in the 365 – 435nm wavelength range and can accommodate samples from 150mm down to pieces. The tool can also be used for backside wafer alignment for double sided wafers. The system can handle either 7” square, 5” square masks. The 7” mask frame holder has a 6” diameter wafer opening and the 5” mask frame holder has a 4” diameter opening.

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