Precision Spin Coater

    Equipment/facility: Equipment

    • LocationShow on map

      Masdar Institute, 1A, Undercroft, Micro/Nanofabrication Facility, Bay 4

    Equipments Details

    Description

    The RCD8 is a basic manual spin coater with the GYRSET® technology serving daily R&D work up to small scale production. The patented GYRSET® rotating closed cover coating technology is integrated into the RCD8 spin coating module. For various photoresists and applications, the GYRSET® technology enables a wider process window. During the process the cover is closed creating a solvent saturated atmosphere. All of the substrate dependent parts, including the air, are locked into the cover and rotate synchronously. This ensures that any turbulence is ruled out and the coating is distributed evenly across the surface of the substrate. The control software is SUSS MMC Tool Control software based on Windows XP. The touchscreen GUI (Graphical User Interface) monitors performance and status of the entire machine. The tool can handle 6” down to 2” round substrates. Smaller samples will need to be mounted to a carrier wafer.

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