Equipments Details
Description
The AJA Orion 300 sputterer is a versatile, load locked PVD system with 5 magnetron, 2 RF, substrate biasing and in-situ heating. It also comes with a dual output, DC power supply. The RF supplies can go up to a maximum of 600W (ramping). The heater can go up to 400C with PID control. A large variety of materials can be deposited in this system. Contact staff if you’d like to deposit (add your material) into our rotation list.
Process Gasses Available: Ar, O2

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