Oxygen Plasma Cleaner

    Equipment/facility: Equipment

    • LocationShow on map

      Masdar Institute, 1A, Undercroft, Micro/Nanofabrication Facility, Bay 4

    Equipments Details


    The Plasma Asher is a simple, low power system with Oxygen and Argon as process gas. The system is designed to strip organic material (photoresist, adhesion promoter etc) from the surface of substrates. It can also be used for surface activation prior to bonding.


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