NW+Graphene CVD system

    Equipment/facility: Equipment

    • LocationShow on map

      Masdar Institute, 1A, Undercroft, Micro/Nanofabrication Facility, Bay 3

    Equipments Details


    The Aixtron Black Magic CVD furnace is dedicated to graphene and carbon nanotube synthesis and can accommodate multiple pieces or a single 4" wafer, with methane, acetylene, nitrogen, ammonia, compressed dry air and hydrogen available as process gases. Process recipes have been optimized and are available to the user for the following: Cu foil (to be provided by the user), Cu-coated substrates, and Ni substrates. The recipes on Cu have been characterized to give excellent monolayer coverage with minimal areas of bilayers and low defectivity. Ni substrates will give multi-monolayer growth. We also have established recipes for Multi wall, Straight vertical and fast/dense growth carbon nanotubes.


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