Micro/Nanofabrication Facility

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• Plasma Sputter deposition

  Equipment/facility: Equipment

• Precision Spin Coater

  Equipment/facility: Equipment

• Rapid Thermal Annealer RTA

  Equipment/facility: Equipment

• Reactive Ion Etcher Cl-

  Equipment/facility: Equipment

• Reactive Ion Etcher Fl-

  Equipment/facility: Equipment

• Solvent Bench

  Equipment/facility: Equipment

• Stack Furnace

  Equipment/facility: Equipment

• Stylus Profilometer

  Equipment/facility: Equipment

• Susbtrate Cleaning Station

  Equipment/facility: Equipment

• SUSS MA6/Gen2 Litho Contact Aligner

  Equipment/facility: Equipment

• SUSS MA8/BA8e Litho Contact Aligner

  Equipment/facility: Equipment

• Vacuum Oven

  Equipment/facility: Equipment

• Video Microscope with 3d

  Equipment/facility: Equipment