Micro/Nanofabrication Facility

Equipments Details

Contact Information

Equipment hierarchy

Micro/Nanofabrication Facility

3D-Micromac: Laser Micromachining

Acid Bench

Atomic Layer Deposition

Dicing Saw

Direct Laser Writer

DRIE Silicon/Silicon Nitride

Ebeam Evaporator

E-Beam Lithography

Flexus 2320 Thin Film Stress Measurement

Fume Hood 1

Fume Hood 2

HMDS Prime

Interferometer

J.A Woolam Variable Angle Ellipsometer

Karl SUSS MA6 (Softwall Cleanroom)

KOH/Base bench

Lesker PVD 75 Hybrid Evaporator

Lesker PVD 75 Thermal Evaporator

MicroTest Scriber

MicroTest Wirebonder

NW+Graphene CVD system

Oven

Oxygen Plasma Cleaner

PECVD

Photoresist Developing Station

Plasma Sputter deposition

Precision Spin Coater

Rapid Thermal Annealer RTA

Reactive Ion Etcher Cl-

Reactive Ion Etcher Fl-

Solvent Bench

Stack Furnace

Stylus Profilometer

Susbtrate Cleaning Station

SUSS MA6/Gen2 Litho Contact Aligner

SUSS MA8/BA8e Litho Contact Aligner

Vacuum Oven

Video Microscope with 3d

Terms of loan/booking

Available for loan - internal and external