Micro/Nanofabrication Facility

    Equipment/facility: Facility

      Equipments Details

      Contact Information

      Equipment hierarchy

      Micro/Nanofabrication Facility
      3D-Micromac: Laser Micromachining
      Acid Bench
      Atomic Layer Deposition
      Dicing Saw
      Direct Laser Writer
      DRIE Silicon/Silicon Nitride
      Ebeam Evaporator
      E-Beam Lithography
      Flexus 2320 Thin Film Stress Measurement
      Fume Hood 1
      Fume Hood 2
      HMDS Prime
      Interferometer
      J.A Woolam Variable Angle Ellipsometer
      Karl SUSS MA6 (Softwall Cleanroom)
      KOH/Base bench
      Lesker PVD 75 Hybrid Evaporator
      Lesker PVD 75 Thermal Evaporator
      MicroTest Scriber
      MicroTest Wirebonder
      NW+Graphene CVD system
      Oven
      Oxygen Plasma Cleaner
      PECVD
      Photoresist Developing Station
      Plasma Sputter deposition
      Precision Spin Coater
      Rapid Thermal Annealer RTA
      Reactive Ion Etcher Cl-
      Reactive Ion Etcher Fl-
      Solvent Bench
      Stack Furnace
      Stylus Profilometer
      Susbtrate Cleaning Station
      SUSS MA6/Gen2 Litho Contact Aligner
      SUSS MA8/BA8e Litho Contact Aligner
      Vacuum Oven
      Video Microscope with 3d

      Terms of loan/booking

      Available for loan - internal and external

      • 3D-Micromac: Laser Micromachining

        Equipment/facility: Equipment

      • Acid Bench

        Equipment/facility: Equipment

      • Atomic Layer Deposition

        Equipment/facility: Equipment

      View all 38 equipment