Lithography System (Tabletop Micro Pattern Generator - µPG 101)

    Equipment/facility: Equipment

    Equipments Details

    Description

    KEY FEATURES AND OPTIONS: - Write speed - 35 mm²/ min - Minimum structure size - 2.5 µm - Address Grid - 100 nm - Aligment measurement accuracy - 400nm - Edge roughness - 200 nm - Standard or UV laser source - Multiple data input formats - Basic gray scale exposure mode - Camera system for alignment - Multiple exchangeable write modes

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