Equipments Details
Description
KEY FEATURES AND OPTIONS:
- Write speed - 35 mm²/ min
- Minimum structure size - 2.5 µm
- Address Grid - 100 nm
- Aligment measurement accuracy - 400nm
- Edge roughness - 200 nm
- Standard or UV laser source
- Multiple data input formats
- Basic gray scale exposure mode
- Camera system for alignment
- Multiple exchangeable write modes

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