Karl SUSS MA6 (Softwall Cleanroom)

    Equipment/facility: Equipment

    • LocationShow on map

      Masdar Institute, 1A, Undercroft, Softwall Cleanroom

    Equipments Details


    The Karl SUSS MA6 is a manual UV aligner that exposes samples in the 365 – 435nm wavelength range and can accommodate samples from 150mm down to pieces. The system can handle either 7” square, 5” square masks. The 7” mask frame holder has a 6” diameter wafer opening and the 5” mask frame holder has a 4” diameter opening. The chucks and mask frames for this tool are usually kept in the Micro & Nanofabrication Facility.


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