Equipments Details
Description
The Karl SUSS MA6 is a manual UV aligner that exposes samples in the 365 – 435nm wavelength range and can accommodate samples from 150mm down to pieces. The system can handle either 7” square, 5” square masks. The 7” mask frame holder has a 6” diameter wafer opening and the 5” mask frame holder has a 4” diameter opening. The chucks and mask frames for this tool are usually kept in the Micro & Nanofabrication Facility.
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