Equipment/facility: Equipment

    • LocationShow on map

      Masdar Institute, 1A, Undercroft, Micro/Nanofabrication Facility, Bay 1

    Equipments Details


    The Filmetrics F40-UV reflectometer provides users with rapid thin film thickness and optical constants measurements on most common device film stacks. The F40-UV combines a three objective microscope with an ultra-violet and visible light reflectance measurement system, allowing point specific film thickness and optical constants determination on substrates ranging from 200 mm diameter wafers down to small pieces. Capabilities: Film thicknesses from several micrometers down to 4 nm, Index of refraction and absorption determination (n and k). Standard films: Oxide on silicon,Nitride on silicon, Polysilicon on oxide on silicon, Photoresist on silicon. Integrated video camera allows observation of the sample position.


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