AJA Sputtering System

    Equipment/facility: Equipment

    Equipments Details

    Description

    AJA offers magnetron sputtering systems for research scale physical vapor deposition ranging from compact (ATC Orion Series) to complex (ATC Flagship Series) plus small batch coaters (ATC-B Series). These sputtering systems can be configured in either con-focal, normal incidence, off-axis, glancing angle, or combination of target to substrate orientations. Substrate holder features include radiant heating (1000°C), azimuthal rotation, RF/DC biasing, z-motion, cooling (H2O or LN2), tilting, or planetary motion.

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