Acid Bench

    Equipment/facility: Equipment

    • LocationShow on map

      Bay 4 - Micro & Nanofabrication Facility, 1A Undercroft

    Equipments Details


    The purpose of the Acid etch bench is to use acid based chemistries to etch (remove) layers from the surfaces of substrates. The Acid bench comes with 3 heated quartz tanks (max 100 C) that can hold up to 25, 6” wafers. This bench supports Piranha cleans, Hot phosphoric acid etching, Aluminum and Chrome etching as well as pre-approved solutions for unique applications. All the drains on the bench go the liquid waste neutralization system which safely neutralizes the hazardous waste.


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