The physics of microelectronic semiconductor devices for silicon integrated circuit applications. Topics: semiconductor fundamentals, p-n junction, metal-oxide semiconductor structure, metal-semiconductor junction, MOS field-effect transistor, bipolar junction transistor and basics of optoelectronic devices. Emphasis on physical understanding of device operation through energy band diagrams. Issues in modern device scaling outlined. Advanced short channel effects, new device design, new materials and intro to nanotechnology covered. Advanced TCAD simulation of devices.